Microscale Heat Conduction in Integrated Circuits and Their Constituent Films

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Preface. Foreword. Acknowledgements. Nomenclature. 1. Introduction. 2. Review of Microscale Thermometry Techniques. 3. High Spatial and Temporal Resolution Thermometry. 4. Thermal Properties of Amorphous Dielectric Films. 5. Heat Conduction in Crystalline Silicon Films. 6. Summary and Recommendations. Bibliography. A. Uncertainty Analysis.