The book presents the mathematical tools used to deal with problems related to slow rarefied flows, with particular attention to basic concepts and problems which arise in the study of micro- and nanomachines. The mathematical theory of slow flows is presented in a practically complete fashion and provides a rigorous justification for the use of the linearized Boltzmann equation, which avoids costly simulations based on Monte Carlo methods. The book surveys the theorems on validity and existence, with particular concern for flows close to equilibria, and discusses recent applications of rarefied lubrication theory to micro-electro-mechanical systems (MEMS). It gives a general acquaintance of modern developments of rarefied gas dynamics in various regimes with particular attention to low speed microscale gas dynamics.

Senior students and graduates in applied mathematics, aerospace engineering, and mechanical mathematical physics will be provided with a basis for the study of molecular gas dynamics. The book will also be useful for scientific and technical researchers engaged in the research on gas flow in MEMS.

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Résumé
This volume is intended to coverthe presentstatus of the mathematicaltools used to deal with problems related to slow rare?ed ?ows. The meaning and usefulness of the subject, and the extent to which it is covered in the book, are discussed in some detail in the introduction. In short, I tried to present the basic concepts and the techniques used in probing mathematical questions and problems which arise when studying slow rare?ed ?ows in environmental sciences and micromachines. For the book to be up-to-date without being excessively large, it was necessary to omit some topics, which are treated elsewhere, as indicated in the introd- tion and, whenever the need arises, in the various chapters of this volume. Their omission does not alter the aim of the book, to provide an understanding of the essential mathematical tools required to deal with slow rare?ed ?ows and give the background for a study of the original literature. Although I have tried to give a rather complete bibliographical coverage,the choice of the topics and of the references certainly re?ects a personal bias and I apologize in advance for any omission. I wish to thank Lorenzo Valdettaro, Antonella Abb` a, Silva Lorenzani and Paolo Barbante for their help with pictures and especially Professor Ching Shen for his permission to reproduce his pictures on microchannel ?ows.

Contenu
The Boltzmann Equation.- Validity and Existence.- Perturbations of Equilibria.- Boundary Value Problems.- Slow Flows in a Slab.- Flows in More Than One Dimension.- Rarefied Lubrication in Mems.