Trace Analysis of Specialty and Electronic Gases

Informationen zum Autor WILLIAM M. GEIGER, B.S., is Senior Partner of CONSCI, LTD, an independent service provider. He is responsible for implementation of analytical technology as it relates to gas analysis, including method development, turn-key instrumentation for customers, and consultation. Mr. Geiger has authored or coauthored numerous papers and presentations relating to trace gas measurement techniques. MARK W. RAYNOR, PhD, is Senior R&D Director at Matheson's Advanced Technology Center. He is responsible for the development of new gas products and precursors for the electronics industry, with an emphasis on the development of instrumental techniques for gas analysis as well as the synthesis, scale-up and purification of specialty gases. Dr Raynor has authored or coauthored more than sixty papers in analytical chemistry. Klappentext Explores the latest advances and applications of specialty and electronic gas analysisThe semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental techniques available for specialty and electronic gas analysis. Moreover, the book details the advantages and disadvantages of each technique, steering readers away from common pitfalls.Featuring contributions from leading analytical and industrial chemists, Trace Analysis of Specialty and Electronic Gases covers a wide range of practical industrial applications. The book begins with the historical development of gas analysis and then focuses on particular subjects or techniques such as: Metals sampling and ICP-MS analysis Improvements in FTIR spectroscopy Water vapor analysis techniques New infrared laser absorption spectroscopy approaches GC/MS, GC/AED, and GC-ICP-MS techniques Gas chromatography columns* Atmospheric pressure ionization mass spectrometryLastly, the book examines gas mixtures and standards that are critical for instrument calibration. There are also two appendices offering information on fittings and material compatibility.With its thorough review of the literature and step-by-step guidance, Trace Analysis of Specialty and Electronic Gases enables researchers to take full advantage of the latest advances in gas analysis. Although the book's focus is the semiconductor and electronics industry, analytical chemists in other industries facing challenges with such issues as detection selectivity and sensitivity, matrix gas interference, and materials compatibility will also discover plenty of useful analytical approaches and techniques. Zusammenfassung This book provides analytical and industrial chemists with up-to-date coverage of the advances in measurement technology in gas analysis. Inhaltsverzeichnis List of Figures xiii List of Tables xxix Foreword xxxiii Acknowledgments xxxv Acronyms xxxvii 1 Introduction to Gas Analysis: Past and Future 1 Suhas N. Ketkar 1.1 The Beginning 2 1.2 Gas Chromatography 5 1.3 Ion Chromatography 9 1.4 Mass Spectrometry 9 1.5 Ion Mobility Spectrometry 11 1.6 Optical Spectroscopy 11 1.7 Metals Analysis 12 1.8 Species Specific Analyzers 13 1.9 Sensors 16 1.10 Future 16 References 17 2 Sample Preparation and ICP-MS Analysis of Gases for Metals 21 Tracey Jacksier, Kohei Tarutani and Martine Carre 2.1 Introduction 21 2.2 Extraction of Impurities Before Analysis 22 2.3 Direct Analysis of ESGs 34 2.4 Conclus...

Auteur

WILLIAM M. GEIGER, B.S., is Senior Partner of CONSCI, LTD, an independent service provider. He is responsible for implementation of analytical technology as it relates to gas analysis, including method development, turn-key instrumentation for customers, and consultation. Mr. Geiger has authored or coauthored numerous papers and presentations relating to trace gas measurement techniques.

MARK W. RAYNOR, PhD, is Senior R&D Director at Matheson's Advanced Technology Center. He is responsible for the development of new gas products and precursors for the electronics industry, with an emphasis on the development of instrumental techniques for gas analysis as well as the synthesis, scale-up and purification of specialty gases. Dr Raynor has authored or coauthored more than sixty papers in analytical chemistry.

Texte du rabat

Explores the latest advances and applications of specialty and electronic gas analysis The semiconductor industry depends upon a broad range of instrumental techniques in order to detect and analyze impurities that may be present in specialty and electronic gases, including permanent gases, water vapor, reaction by-products, and metal species. Trace Analysis of Specialty and Electronic Gases draws together all the latest advances in analytical chemistry, providing researchers with both the theory and the operating principles of the full spectrum of instrumental techniques available for specialty and electronic gas analysis. Moreover, the book details the advantages and disadvantages of each technique, steering readers away from common pitfalls. Featuring contributions from leading analytical and industrial chemists, Trace Analysis of Specialty and Electronic Gases covers a wide range of practical industrial applications. The book begins with the historical development of gas analysis and then focuses on particular subjects or techniques such as: Metals sampling and ICP-MS analysis Improvements in FTIR spectroscopy Water vapor analysis techniques New infrared laser absorption spectroscopy approaches GC/MS, GC/AED, and GC-ICP-MS techniques Gas chromatography columns * Atmospheric pressure ionization mass spectrometry Lastly, the book examines gas mixtures and standards that are critical for instrument calibration. There are also two appendices offering information on fittings and material compatibility. With its thorough review of the literature and step-by-step guidance, Trace Analysis of Specialty and Electronic Gases enables researchers to take full advantage of the latest advances in gas analysis. Although the book's focus is the semiconductor and electronics industry, analytical chemists in other industries facing challenges with such issues as detection selectivity and sensitivity, matrix gas interference, and materials compatibility will also discover plenty of useful analytical approaches and techniques.

Résumé
This book provides analytical and industrial chemists with up-to-date coverage of the advances in measurement technology in gas analysis.

Contenu

List of Figures xiii

List of Tables xxix

Foreword xxxiii

Acknowledgments xxxv

Acronyms xxxvii

1 Introduction to Gas Analysis: Past and Future 1
Suhas N. Ketkar

1.1 The Beginning 2

1.2 Gas Chromatography 5

1.3 Ion Chromatography 9

1.4 Mass Spectrometry 9

1.5 Ion Mobility Spectrometry 11

1.6 Optical Spectroscopy 11

1.7 Metals Analysis 12

1.8 Species Specific Analyzers 13

1.9 Sensors 16

1.10 Future 16

References 17

2 Sample Preparation and ICP-MS Analysis of Gases for Metals 21
Tracey Jacksier, Kohei Tarutani and Martine Carre

2.1 Introduction 21

2.2 Extraction of Impurities Before Analysis 22

2.3 Direct Analysis of ESGs 34

2.4 Conclusion 40

References 41

3 Novel Improvements in FTIR Analysis of Specialty Gases 43
Barbara Marshik and Jorge E. Pérez

3.1 Gas Phase Analysis Using FTIR Spectroscopy 43

3.2 Gas Phase Effects on Spectral Line Shape 44

3.3 Effects that Greatly Impact Quantification 55

3.4 Future Applications 68

References 69

**4 Emerging Infrared Laser Absorption Spectroscopic Techniques for Gas Analysis…