Micromachined Circuits and Devices

This book presents the design of different switching and resonant devices using the present state-of-the-art radio frequency (RF) micromachining (MEMS) technology. Different topologies of MEMS switches have been discussed considering optimum performances over microwave to millimeter wave frequency range. Wide varieties of micromachined switching networks starting from single-pole-double-throw (SPDT) to single-pole-fourteen-throw (SP14T) are discussed utilizing vertical and lateral actuation movements of the switch. Different transduction mechanisms of micromachined resonators are highlighted that includes capacitive, piezoelectric, and piezoresistive types. The book provides major design guidelines for the development of MEMS-based digital phase shifters, tunable filters, and antennas with extensive measurement data. Apart from the radio frequency (RF) requirements, an extensive guideline is given for the improvement of the reliability of micromachined switches and digital phaseshifters where multiple switches are operating simultaneously. It takes multiple iterations and extensive characterizations to conclude with a reliable MEMS digital phase shifter, and these aspects are given one of the prime attentions in this book. Detailed performance analysis of metamaterial inspired MEMS switches is then discussed for application in millimeter wave frequency bands up to about 170 GHz. The book concludes with future research activities of RF MEMS technology and its potential in space, defense, sensors, and biomedical applications.

Highlights the design of different switching and resonant devices using state-of-the-art RF Discusses different topologies of MEMS switches considering optimum performances Includes design guidelines for the development of MEMS based digital phase shifters, tunable filters and antennas

Auteur

Shiban K Koul is Emeritus Professor at the Indian Institute of Technology Delhi. His research interests include RF MEMS, high frequency wireless communication, microwave engineering, microwave passive and active circuits, device modelling, millimetre and sub-millimetre wave IC design, body area networks, flexible and wearable antennas, medical applications of sub-terahertz waves and reconfigurable microwave circuits including miniaturized antennas. He has successfully completed 38 major sponsored projects, 52 consultancy projects and 61 technology development projects. He has authored/co-authored 550 research papers, 17 state-of-the art books, 5 book Chapters and 2 e-books. He holds 26 patents, 6 copyrights and one trademark. He has guided 27 PhD theses and more than 120 master's theses. Dr. Koul is Life Fellow of IEEE, USA, and Fellow of INAE and IETE in India. He is Chief Editor of IETE Journal of Research and Associate Editor of the International Journal of Microwave and Wireless Technologies, Cambridge University Press. He served as Distinguished Microwave Lecturer of IEEE MTT-S for the period 2012-2014. He is recipient of numerous awards including IEEE MTT Society Distinguished Educator Award (2014); Teaching Excellence Award (2012) from IIT Delhi, etc. Sukomal Dey is Assistant Professor at the Indian Institute of Technology Palakkad. His research interests include RF MEMS, microwave to sub-mmWave metamaterial structures and microwave integrated circuits including antennas. He has authored or co-authored more than 80 research papers, 1 state-of-the art book, 2 book chapters and holds 11 patents. He is recipient of the Postgraduate Student Award from the Institute of Smart Structure and System, Bangalore, in 2012, Best Industry Relevant PhD Thesis Award from the Foundation for Innovation in Technology Transfer, IIT Delhi in 2016, Postdoctoral Fellow Scholarships from the Ministry of Science and Technology (MOST), Taiwan in 2016 and 2017, and IETE-Smt Ranjana Pal Memorial Award - 2021.

Contenu
Introduction to Radio Frequency Micro Electromechanical Systems.- Micromachined Microwave Passive Circuits.- Micromachined Single-Pole-Single-Throw Switches.- Micromachined Single-Pole-Multi-Thru Switching Networks.- Micromachined Resonators and Circuits.- Micromachined Phase Shifters.- Micromachined Tunable Filters using MEMS Switches.- Reliability Analysis of RF MEMS Devices.- Micromachined Antennas.- Micromachined Metamaterial Inspired Switches.- Future Scope of RF MEMS at THz Regime.