Ion Spectroscopies for Surface Analysis

Determining the elemental composition of surfaces is an essential measurement in characterizing solid surfaces. At present, many ap proaches may be applied for measuring the elemental and molecular composition of a surface. Each method has particular strengths and limitations that often are directly connected to the physical processes involved. Typically, atoms and molecules on the surface and in the near surface region may be excited by photons, electrons, ions, or neutrals, and the detected particles are emitted, ejected, or scattered ions or electrons. The purpose of this book is to bring together a discussion of the surface compositional analysis that depends on detecting scattered or sputtered ions, and the methods emphasized are those where instruments are commercially available for carrying out the analysis. For each topic treated, the physical principles, instrumentation, qualitative analysis, artifacts, quantitative analysis, applications, opportunities, and limita tions are discussed. The first chapter provides an overview of the role of elemental composition in surface science; compositional depth profiling; stimulation by an electric field, electrons, neutrals, or photons and detection of ions; and then stimulation by ions, and detection of ions, electrons, photons, or neutrals.

Contenu

1. Overview of Ion Spectroscopies for Surface Compositional Analysis.- Glossary of Acronyms.- 1. Purposes.- 2. Introduction.- 3. Overview of Compositional Surface Analysis by Ion Spectroscopies.- 4. Ion Spectroscopies Using Ion Stimulation.- 5. Ion Spectroscopies Using Ion Detection.- References.- 2. Surface Structure and Reaction Studies by Ion-Solid Collisions.- 1. Introduction.- 2. The Experimental Approach.- 3. How to View the Process.- 4. Electronic Effects.- 5. Surface Characterization with Ion Bombardment.- 6. Conclusions and Prospects.- References.- 3. Particle-Induced Desorption Ionization Techniques for Organic Mass Spectrometry.- 1. Introduction.- 2. Spectral Effects of Primary Beam Parameters.- 3. Properties of Secondary Ions.- 4. Sample Preparation.- 5. Special Techniques.- 6. Future Prospects.- References.- 4. Laser Resonant and Nonresonant Photoionization of Sputtered Neutrals.- Glossary of Symbols and Acronyms.- 1. Introduction.- 2. Photoionization.- 3. Experimental Details.- 4. Artifacts, Quantitation, Capabilities, and Limitations.- 5. Applications.- 6. Future Directions.- 7. Summary.- References.- 5. Rutherford Backscattering and Nuclear Reaction Analysis.- 1. Introduction.- 2. Principles of the Methods.- 2. Apparatus.- 4. Quantitative Analysis and Sensitivity.- 5. Ion Scattering as a Structural Tool.- 6. Applications.- 7. Outstanding Strengths of RBS in Relation to AES, XPS, and SIMS.- References.- 6. Ion Scattering Spectroscopy.- 1. Introduction.- 2. Basic Principles.- 3. Experimental Techniques.- 4. Calculations.- 5. Analysis of Surface Composition.- 6. Structure of Crystalline Surfaces.- References.- 7. Comparison of SIMS, SNMS, ISS, RBS, AES, and XPS Methods for Surface Compositional Analysis.- 1. Purpose.- 2. Introduction.- 3. Comparison Categories or Criteria.- 4. The Surface Analysis Community.- References.- Standard Terminology Relating to Surface Analysis.- Density of Large-Diameter Ion Beams for Sputter Depth Profiling of Solid Surfaces.- Standard Guide for Specimen Handling in Auger Electron Spectroscopy, X-Ray Photoelectron Spectroscopy, and Secondary Ion Mass Spectrometry.- Standard Practice for Reporting Sputter Depth Profile Data in Secondary Ion Mass Spectrometry (SIMS).