Microscopy of Semiconducting Materials 2003

Modern electronic devices rely on ever-greater miniaturization of components, and semiconductor processing is approaching the domain of nanotechnology. Studies of devices in this regime can only be carried out with the most advanced forms of microscopy. Accordingly, Microscopy of Semiconducting Materials focuses on international developments in semiconductor studies carried out by all forms of microscopy. It provides an overview of the latest instrumentation, analysis techniques, and state-of-the-art advances in semiconducting materials science for solid state physicists, chemists, and material scientists.

Autorentext

A.G. Cullis, P.A. Midgley

Inhalt

1. High Resolution Microscopy and Microanalysis 2. Self-Organised and Quantum Domain Structures 3. Epitaxy - Growth Phenomena 4. Epitaxy - Wide Band-Gap Nitrides 5. Processed Silicon and Other Device Materials 6. Metalliztion, Silicides and Contacts 7. Device Studies 8. Scanning Electron and Ion Advances 9. Scanning Probe Microscopy